New microcapacitors developed by scientists show record energy and power densities, paving the way for on-chip energy storage in electronic devices.
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Power-Dense Microcapacitors Pave the Way for On-Chip Energy Storage In an early look at on-chip power, researchers have demonstrated that thin-film micro-capacitors can
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Microcapacitors made with engineered hafnium oxide/zirconium oxide films in 3D trench capacitor structures – the same structures used in modern microelectronics – achieve
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The latest advancement in capacitor technology offers a 19-fold increase in energy storage, potentially revolutionizing power sources for EVs and devices.
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The properties of the resulting devices are record breaking: compared to the best electrostatic capacitors today, these microcapacitors have nine-times higher energy density and 170-times higher power density (80 mJ-cm-2 and 300 kW-cm-2, respectively). “The energy and power density we got are much higher than we expected,” said Salahuddin.
"We've shown that it's possible to store a lot of energy in micro capacitors made from engineered thin films, much more than what is possible with ordinary dielectrics," said Sayeed Salahuddin, the Berkeley Lab faculty senior scientist, and UC Berkeley professor who led the project.
Berkeley Lab scientists have achieved record-high energy and power densities in microcapacitors made with engineered thin films, using materials and fabrication techniques already widespread in chip manufacturing. Their work paves the way for advanced on-chip energy storage and power delivery in next-generation electronics.
Microcapacitors made with engineered hafnium oxide/zirconium oxide films in 3D trench capacitor structures – the same structures used in modern microelectronics – achieve record-high energy storage and power density, paving the way for on-chip energy storage. (Credit: Nirmaan Shanker/Suraj Cheema)
Here, the researchers achieved their record-breaking microcapacitors by carefully engineering thin films of HfO 2 -ZrO 2 to achieve a negative capacitance effect. Normally, layering one dielectric material on top of another results in an overall lower capacitance.
However, capacitors generally have much lower energy densities than batteries, meaning they can store less energy per unit volume or weight, and that problem only gets worse when you try to shrink them down to microcapacitor size for on-chip energy storage.
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